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Discover the power of Ansys simulation in modeling spin cleaning for semiconductor fabrication and how it can optimize the process for enhanced efficiency and productivity.

Understanding Spin Cleaning in Semiconductor Fabrication

Spin cleaning is a critical process in semiconductor fabrication that involves the removal of contaminants from the surface of semiconductor wafers. Contaminants can include particles, organic residues, and other impurities that can negatively impact the performance and reliability of the final semiconductor devices.

The spin cleaning process typically involves spinning the wafer at a high speed while applying a cleaning solution. This centrifugal force helps to dislodge and remove contaminants from the surface. The cleaning solution can vary depending on the specific contaminants being targeted, but commonly used solutions include mixtures of deionized water and various chemicals.

Spin process geometry

Understanding the physics and dynamics of spin cleaning is crucial for optimizing the process and achieving the desired level of cleanliness. Simulation techniques play a key role in this understanding by allowing engineers to model and analyze the various parameters involved in spin cleaning, such as spin speed, cleaning solution composition, and wafer surface properties.

By simulating the spin cleaning process, engineers can gain insights into how different parameters affect the cleaning efficiency and identify optimal conditions for achieving the desired level of cleanliness. This can help in reducing defects, improving yield, and enhancing the overall quality of semiconductor devices.

Furthermore, simulation techniques enable engineers to explore different cleaning strategies and evaluate their effectiveness before implementing them in the actual fabrication process. This saves time and resources by avoiding trial and error approaches and allows for more informed decision-making.

In summary, understanding spin cleaning in semiconductor fabrication is crucial for achieving high-quality, reliable semiconductor devices. Simulation techniques provide a powerful tool for optimizing the spin cleaning process and improving efficiency and productivity in semiconductor fabrication.

Capabilities of Ansys Simulation in Spin Cleaning

Simulation techniques offer several benefits in spin cleaning for semiconductor fabrication.

  • Provide a cost-effective and time-efficient way to explore different cleaning strategies and optimize the process parameters. By simulating the cleaning process, engineers can identify the most effective cleaning solution composition, spin speed, and other parameters that lead to the desired level of cleanliness.
  • Enable engineers to understand the underlying physics and dynamics of spin cleaning. This understanding helps in predicting and controlling the cleaning process, leading to more consistent and reliable results. It also allows for troubleshooting and identifying potential issues before they occur in the actual fabrication process.
  • Use simulations to test and evaluate new cleaning techniques, materials, and equipment without the need for costly and time-consuming experimentation. This accelerates the development of advanced spin cleaning processes and contributes to the continuous improvement of semiconductor fabrication.

Ansys Computational Fluid Dynamics (CFD) simulation tools are the most widely used CFD tools world wide. The following is a small selection for key capabilities for spin cleaning simulations

  • Multiphase volume of fluid model to capture liquid air interface
  • Eulerian Lagrangian transition model to simulation liquid droplet breakup and coalescence. 
  • Rotating domain model for high speed spin simulations
  • Surface tension and surface reaction models
  • Wide range of turbulence models


Ozen Engineering Experience with Spin Cleaning

Ozen Engineering has extensive experience in the field of spin cleaning for semiconductor fabrication. With a team of highly skilled engineers and state-of-the-art simulation tools, Ozen Engineering has helped numerous customers optimize their spin cleaning processes and achieve superior results. Through a unique combination of software, consulting and mentoring, Ozen Engineering is best positioned to bring fast and accurate results to our customers.

Spin Process Liquid ACleaning agent spray

Spin Process liquid BRinsing process

Spin Process efficiency

Rinsing and cleaning solution mass fraction

Through advanced simulations, Ozen Engineering has been able to identify the most effective cleaning strategies for different types of contaminants and surface materials. By understanding the unique challenges faced by each client, Ozen Engineering tailors their simulation approach to meet specific requirements and deliver customized solutions.

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Post by MingYao Ding
November 21, 2023